This paper presents experimental RF characterizations and modeling on the nano-scale multi-finger gate MOSFETs of the HLMC 40 nm low-power CMOS technology. Both the resistive and capacitive components in the equivalent circuit model for the RF MOSFET devices are calibrated based on temperature-dependent S-parameter measurements (0.25 -40 GHz) from 298 K to 6 K. By integrating the intrinsic device model and the extrinsic parasitic parameters, a generic cryogenic device RF model is developed to capture the cutoff frequency and high-frequency performance of NMOS and PMOS transistors with varied device configurations. The establishment of validated database as functions of device size, temperature, and frequency responses lays a solid foundation for practical large-scale cryo-CMOS RF circuit design and optimization.

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