Partially missing bands in the preset region for Hough transform might strongly affect the accuracy of indexing Kikuchi patterns and reduce the quality of electron backscatter diffraction (EBSD) maps. This paper proposes a novel local band detection method for such kind of low‐quality patterns. The approach involves rotating bands to vertical direction, detecting the local line segments through calculating the largest horizontal average grey gradient with a constant interval of 400 pixels in vertical direction, and applying Hough transform as well as weighted averaging to these line clusters to unify the edges of Kikuchi band. Therefore, even if only part of a Kikuchi band is visible, the entire band can also be accurately extracted. The average interplanar angle error obtained by the proposed method is approximately 29.0% less than those obtained by Hough transform‐based technique. Moreover, the comparison of mean angular deviation (MAD) is also discussed. The average MAD of this method is about 38.5% lower than that of Hough transform‐based technique. Consequently, the local Kikuchi band detection method is expected to be used for post‐processing and re‐indexing the EBSD low‐quality patterns.

An electron backscatter diffraction device is an important accessory for a scanning electron microscope and can provide crystal structure orientation and phase content data through analysis of electron backscatter diffraction patterns. The acquisition of these data depends on pattern indexing, including interplanar angle calculation and crystal plane indexation. The coordinates of the source point are key points for interplanar angle calculation, and they vary with the movement of the incident beam. In this study, we first combined the grey gradient calculation with screen moving method to achieve accurate positioning of source point and obtained coordinates of source point with sub‐pixel precision. The errors of three coordinates were 0.07%, 0.06% and 0.04%, respectively. By using this coordinate of source point to conduct interplanar angle calculation the maximum error was 0.53°, which was a good proof of the accuracy of source point positioning. Then we established the relationship between source point coordinates variation and incident beam movement. Coordinates can be given out based on the displacement of beam directly. And to illustrate the accuracy, interplanar angle calculation was performed and the maximum error was 0.81°. This means that the relationship between variation of source point coordinates and beam movement is highly accurate.