The present study focuses on implementing a complementary metal-oxide semiconductor (CMOS) microelectromechanical system thermal switch by using the commercially available Taiwan Semiconductor Manufacturing Company (TSMC) 0.35 mm two-poly four-metal CMOS process. There are two novel designs: first, the soft contact structure and post-processing fabrication; second, a new design of thermal actuator. To create the soft contact structure, residual stress effect has been utilised to make different bending curvatures. According to the experiments, the layer metal-1 has the largest residual stress effect that can achieve the largest deflection in the z-axis. Because the residual stress of the layer metal-1 is negative, the structure will bend down after release, hence providing larger contact area, which has been set up to obtain the lowest contact miss ability. In the post-processing fabrication, 0.3 mm thickness gold will be patterned at the contact tips. Since gold, rather than aluminium, has no oxidation issue, it has more reliability in preventing the problem of oxidation than aluminium. In the new thermal actuator design, the authors designed a novel folded-flexure with the electrothermal excitation to turn the switch on or off. In the prototype, the device size is 500 × 400 mm and the gap between two contact pads is 9 mm in off-state. Depending on the simulation results, the switch can work stably at 3 V, and the working temperature and operating bandwidth are individually 20-2008C.

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This paper focuses on implementing two novel CMOS-MEMS type switches: buckling type and thermal type, by using commercially available TSMC 0.35 μm two-poly four-metal (2P4M) CMOS process. There are two novel designs in these two type switches: first, the soft contact structure with post-processing fabrication; second, using residual stress to achieve large structural deformation in buckling type and thermal type switches. To create the soft contact structure, residual gradient stress effect has been utilized to make bending-down curvatures. According to the experiments, the layer Metal1 has the largest negative residual gradient stress [1] effect that can achieve the largest negative deflection in z-axis. Because the structure will bend down after post-processing release, larger lateral contact area are set up to gain the lower contact miss ability. In the post-processing fabrication, 0.3μm thickness gold will be deposited on the contact tips. Due to the essence of gold, comparing with aluminum, has no oxidation issue, gold also has the advantage of higher conductivity to reduce the electrical power loss. In the buckling type design, the switch uses residual stress to achieve lateral buckling effect to solve long distance problem. In the thermal type design, this paper design a folded-flexure [2, 3] with the electro-thermal excitation to turn the switch on or off. In the prototype, the device size is 500 μm × 400 μm and the gap between two contact pads is 9 μm in offstate. on the experimental results, the switch can work stably at 3 volts, and the displacement of the thermal type switch can achieve 2.7μm, which is sufficient for the mechanism of switching-on or switching-off.