A highly reproducible route for the epitaxial growth
of single-crystalline
monolayer MoS2 on a C-plane sapphire substrate was developed
using vapor-pressure-controllable inorganic molecular precursors MoOCl4 and H2S. Microscopic, crystallographic, and spectroscopic
analyses indicated that the epitaxial MoS2 film possessed
outstanding electrical and optical properties, excellent homogeneity,
and orientation selectivity. The systematic investigation of the effect
of growth temperature on the crystallographic orientations of MoS2 revealed that the surface termination of the sapphire substrate
with respect to the growth temperature determines the crystallographic
orientation selectivity of MoS2. Our results suggest that
controlling the surface to form a half-Al-terminated surface is a
prerequisite for the epitaxial growth of MoS2 on a C-plane
sapphire substrate. The insights on the growth mechanism, especially
the significance of substrate surface termination, obtained through
this study will aid in designing efficient epitaxial growth routes
for developing single-crystalline monolayer transition metal dichalcogenides.
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