The development of flexible electronic skins with high sensitivities and multimodal sensing capabilities is of great interest for applications ranging from human healthcare monitoring to robotic skins to prosthetic limbs. Although piezoresistive composite elastomers have shown great promise in this area of research, typically poor sensitivities and low response times, as well as signal drifts with temperature, have prevented further development of these materials in electronic skin applications. Here, we introduce and demonstrate a design of flexible electronic skins based on composite elastomer films that contain interlocked microdome arrays and display giant tunneling piezoresistance. Our design substantially increases the change in contact area upon loading and enables an extreme resistance-switching behavior (ROFF/RON of ∼10(5)). This translates into high sensitivity to pressure (-15.1 kPa(-1), ∼0.2 Pa minimum detection) and rapid response/relaxation times (∼0.04 s), with a minimal dependence on temperature variation. We show that our sensors can sensitively monitor human breathing flows and voice vibrations, highlighting their potential use in wearable human-health monitoring systems.

Fingertip skin-mimicking ferroelectric skins sensitively detect and discriminate static/dynamic pressure and temperature.

Stretchable electronic skins with multidirectional force-sensing capabilities are of great importance in robotics, prosthetics, and rehabilitation devices. Inspired by the interlocked microstructures found in epidermal-dermal ridges in human skin, piezoresistive interlocked microdome arrays are employed for stress-direction-sensitive, stretchable electronic skins. Here we show that these arrays possess highly sensitive detection capability of various mechanical stimuli including normal, shear, stretching, bending, and twisting forces. Furthermore, the unique geometry of interlocked microdome arrays enables the differentiation of various mechanical stimuli because the arrays exhibit different levels of deformation depending on the direction of applied forces, thus providing different sensory output patterns. In addition, we show that the electronic skins attached on human skin in the arm and wrist areas are able to distinguish various mechanical stimuli applied in different directions and can selectively monitor different intensities and directions of air flows and vibrations.

Flexible pressure sensors with a high sensitivity over a broad linear range can simplify wearable sensing systems without additional signal processing for the linear output, enabling device miniaturization and low power consumption. Here, we demonstrate a flexible ferroelectric sensor with ultrahigh pressure sensitivity and linear response over an exceptionally broad pressure range based on the material and structural design of ferroelectric composites with a multilayer interlocked microdome geometry. Due to the stress concentration between interlocked microdome arrays and increased contact area in the multilayer design, the flexible ferroelectric sensors could perceive static/dynamic pressure with high sensitivity (47.7 kPa, 1.3 Pa minimum detection). In addition, efficient stress distribution between stacked multilayers enables linear sensing over exceptionally broad pressure range (0.0013-353 kPa) with fast response time (20 ms) and high reliability over 5000 repetitive cycles even at an extremely high pressure of 272 kPa. Our sensor can be used to monitor diverse stimuli from a low to a high pressure range including weak gas flow, acoustic sound, wrist pulse pressure, respiration, and foot pressure with a single device.

The development of electronic skin (e‐skin) is of great importance in human‐like robotics, healthcare, wearable electronics, and medical applications. In this paper, a bioinspired e‐skin design of hierarchical micro‐ and nano‐structured ZnO nanowire (NW) arrays in an interlocked geometry is suggested for the sensitive detection of both static and dynamic tactile stimuli through piezoresistive and piezoelectric transduction modes, respectively. The interlocked hierarchical structures enable a stress‐sensitive variation in the contact area between the interlocked ZnO NWs and also the efficient bending of ZnO NWs, which allow the sensitive detection of both static and dynamic tactile stimuli. The flexible e‐skin in a piezoresistive mode shows a high pressure sensitivity (−6.8 kPa−1) and an ultrafast response time (<5 ms), which enables the detection of minute static pressure (0.6 Pa), vibration level (0.1 m s−2), and sound pressure (≈57 dB). The flexible e‐skin in a piezoelectric mode is also demonstrated to be able to detect fast dynamic stimuli such as high frequency vibrations (≈250 Hz). The flexible e‐skins with both piezoresistive and piezoelectric sensing capabilities may find applications requiring both static and dynamic tactile perceptions such as robotic hands for dexterous manipulations and various healthcare monitoring devices.