In this work, transparent ZnO thin‐film transistors (TFTs) are fabricated on ITO glass substrate with only solution processes. The active ZnO channels are deposited by spray pyrolysis. The gate dielectric is a spin‐coated high dielectric constant (k) titanium‐silicon oxide (TSO) layer, while the source/drain (S/D) electrodes are patterned by two‐step spray‐printing of silver nanowire (AgNWs)/poly(3,4‐ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) transparent conductive composite through a shadow mask. The composition and microstructural characteristics of the films, as well as their TFTs performance, are systematically studied as a function of the temperature. The introduction of TSO high k dielectric, with ultraviolet (UV)‐assisted post‐annealing, significantly improves the device performance and achieves a maximum electron mobility (µmax) value as high as 56.2 cm2 V−1 s−1 when measured with thermally‐evaporated Al top electrode. For fully solution‐processed transparent TFTs with low temperature fabricated AgNWs/PEDOT:PSS S/D electrodes, the µmax is calculated to be 9.1 cm2 V−1 s−1 operating at a relatively low voltage of <3 V. The TFTs also show hysteresis‐free electrical characteristics and optical transparency of ≈80% in the visible region of the optical spectrum.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
customersupport@researchsolutions.com
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.