Aims and Scope of the SeriesThe purpose of this series is to focus on subjects in which fluid mechanics plays a fundamental role.As well as the more traditional applications of aeronautics, hydraulics, heat and mass transfer etc., books will be published dealing with topics which are currently in a state of rapid development, such as turbulence, suspensions and multiphase fluids, super and hypersonic flows and numerical modeling techniques.It is a widely held view that it is the interdisciplinary subjects that will receive intense scientific attention, bringing them to the forefront of technological advancement. Fluids have the ability to transport matter and its properties as well as to transmit force, therefore fluid mechanics is a subject that is particularly open to cross fertilization with other sciences and disciplines of engineering. The subject of fluid mechanics will be highly relevant in domains such as chemical, metallurgical, biological and ecological engineering. This series is particularly open to such new multidisciplinary domains.The median level of presentation is the first year graduate student. Some texts are monographs defining the current state of a field; others are accessible to final year undergraduates; but essentially the emphasis is on readability and clarity.For other titles published in this series, go to www.springer.com/series/5980
The Indium Tin Oxide (ITO) platform is one of the promising solutions for state-of-the-art integrated optical modulators towards low-loss silicon photonics applications. One of the key challenges on this way is to optimize ITO-based thin films stacks for electro-optic modulators with both high extinction ratio and low insertion loss. In this paper we demonstrate the e-beam evaporation technology of 20 nm-thick ITO films with low extinction coefficient of 0.14 (Nc = 3.7·1020 cm−3) at 1550 nm wavelength and wide range of carrier concentrations (from 1 to 10 × 1020 cm−3). We investigate ITO films with amorphous, heterogeneously crystalline, homogeneously crystalline with hidden coarse grains and pronounced coarsely crystalline structure to achieve the desired optical and electrical parameters. Here we report the mechanism of oxygen migration in ITO film crystallization based on observed morphological features under low-energy growth conditions. Finally, we experimentally compare the current–voltage and optical characteristics of three electro-optic active elements based on ITO film stacks and reach strong ITO dielectric permittivity variation induced by charge accumulation/depletion (Δn = 0.199, Δk = 0.240 at λ = 1550 nm under ± 16 V). Our simulations and experimental results demonstrate the unique potential to create integrated GHz-range electro-optical modulators with sub-dB losses.
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