Longwave infrared (LWIR) optics are essential for several technologies, such as thermal imaging and wireless communication, but their development is hindered by their bulk and high fabrication costs. Metasurfaces have recently emerged as powerful platforms for LWIR integrated optics; however, conventional metasurfaces are highly chromatic, which adversely affects their performance in broadband applications. In this work, the chromatic dispersion properties of metasurfaces are analyzed via ray tracing, and a general method for correcting chromatic aberrations of metasurfaces is presented. By combining the dynamic and geometric phases, the desired group delay and phase profiles are imparted to the metasurfaces simultaneously, resulting in good achromatic performance. Two broadband achromatic metasurfaces based on all-germanium platforms are demonstrated in the LWIR : a broadband achromatic metalens with a numerical aperture of 0.32, an average intensity efficiency of 31%, and a Strehl ratio above 0.8 from 9.6 μm to 11.6 μm, and a broadband achromatic metasurface grating with a constant deflection angle of 30° from 9.6 μm to 11.6 μm. Compared with state-of-the-art chromatic-aberration-restricted LWIR metasurfaces, this work represents a substantial advance and brings the field a step closer to practical applications.

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In this paper, we proposed a double-layer all-dielectric grating. Under the premise of ensuring the strength of the resonance peak, the upper SiO2 grating layer suppresses the tendency of high-order dipole resonance excitation and improves the transmittance at the non-resonant position (T > 99%). The distribution of chromaticity coordinates on the CIE 1931 chromaticity diagram also proves that suppressing side peaks can effectively increase the saturation of structural colors, which is essential for a high precision imaging system. The cyclic displacement current excites the magnetic dipole resonance, which causes the magnetic field to be confined in the high refractive index material HfO2 grating layer. By adjusting the duty cycle of the grating structure, a reflection spectrum with low full width half maximum (FWHM) (∼2 nm) and high-quality factor Q (∼424.5 nm) can be obtained. And the spectral intensity is more sensitive to the polarization angle. This work is of great significance to the development of sensors, display imaging and other fields. At the same time, the material of the grating filter meets the requirements of high damage threshold of the high-power laser system, and its high-power laser application potential is inestimable.

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