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This paper presents a novel design for a MEMS-based slider-suspension device with inherently improved mechanical performance over traditional components for high-performance magnetic recording. The device was modeled numerically to simulate two kinds of micro-dynamics characteristics: the adhesion/shock-induced dynamic deflection of micro-suspension and the particle-deflecting performance of the micro-deflector. The simulation shows that the dynamic deflection of the micro-suspension can be reduced by decreasing the contact area of the attached secondary slider, and that the brittle fracture probability of the micro-suspension under 1000G shock can be attained to be as low as 1.0 × 10-5 . The simulation also illustrates that the micro-deflector can prevent 80% of flowing particles under the primary slider from entering the micro-system. A new process is also presented and used to fabricate the designs.

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