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Silver nanoparticles (Ag NPs) and the titanium dioxide (TiO 2 ) dielectric layer produced by magnetron sputtering and subsequent annealing treatment, were integrated at the front side of crystalline silicon (c-Si) solar cells. A photovoltaic device was realized based on the c-Si substrate and stacked Ag NPs/TiO 2 /n/p/Ag layer. The results show that the energy conversion efficiency (ECE) can be improved by 9.9% with the introduction of well-sized Ag NPs and an ultrathin TiO 2 dielectric layer to the c-Si solar cells. The presence of the dielectric layer enables Ag NPs to fully exert the advantage of localized surface plasmon resonance (LSPR) and light scattering, and the recombination of the photogenerated carriers originating from Ag NPs is effectively avoided at the surface or in the vicinity of Ag NPs. Moreover, COMSOL Multiphysics simulations were performed to investigate the reflection and absorption of incident light in the c-Si. The simulation results match well with the experimental data.

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