Aiming for application to ferroelectric and optical devices, we attempted to fabricate one-axis-oriented lead zirconate titanate Pb(Zr,Ti)O3 (PZT) films on glass substrates with processing temperature below their grass-transition point. Chemical solution deposition (CSD)-derived PZT films with preferential crystal orientation of (00l)/(h00)PZT were grown ITO/glass with crystalline buffer layer of calcium niobate Ca2Nb3O10 (ns-CN). The ns-CN buffer layers also lowered crystallization temperature of the CSD-derived films, resulting in crystalline PZT films with one-axis (00l) orientation and ferroelectricity of P
r = 4 μC cm-2 deposited on transparent glass substrates at the crystallization temperature of 500 oC.
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