Indium oxide (In2O3) thin lms were deposited on glass substrate by varying substrate temperature in the range of 400600• C using the spray pyrolysis technique. In this research, physical properties of indium oxide thin lms were studied and then nanocrystalline sizes at dierent substrate temperature were deeply compared and investigated. All lms were characterized at room temperature using X-ray diraction, scanning electron microscopy, atomic force microscopy, photoluminescence, the Hall eect and UV-visible spectrophotometer. The optimal substrate temperature to obtain lms of high crystallographic quality was 575• C, for this temperature, the electrical resistivity was in the order of ρ = 0.147 Ω cm. For comparing optical transmittance and electrical conductivity the best gure of merit of the lms was achieved at 575•

Spray pyrolysis method was applied for the preparation of indium oxide (In 2 O 3 ) thin films, by varying the substrate temperature range from 400-600℃. All the samples were characterized at room temperature by using X-Ray diffraction, Scanning electron microscopy, Atomic Force Microscopy, Hall Effect and UV-Visible spectrophotometry. The optimal substrate temperature required for obtaining films of high crystallographic quality was 575℃. By comparing optical transmittance and electrical conductivity it was observed that the best figure of merit for these films was achieved for the same temperature and electrical resistivity was in the order of ρ=1.47×10 -1 [Ωcm]. Gas sensing measurements of the films in ethanol showed enhancement with surface roughness and sheet resistance.

Abstract:In this research, indium oxide nanostructure undoped and doped with F were prepared on glass substrates using spray pyrolysis technique. Various parameters such as dopant concentration, deposition temperatures, amount of indium oxide powder were discussed. Structural properties of these films were investigated by XRD & SEM. Electrical and optical properties have been studied by Hall Effect and UV-Visible spectrophotometer respectively. The thickness of the films is determined by PUMA software. The variation in refractive index, extension coefficient and band gap of these films also were investigated.