Both conductive atomic force microscopy (CAFM) and transmission electron microscopy have been used to characterize the defects or He bubbles in low-energy (120 eV) H and He irradiated tungsten (W). By a comparative study, we find that the current mapping from CAFM is very sensitive in the detection of nanometer-sized defects in low-energy H and He irradiated W. Our calculation confirms that the resistance change in H and He irradiated W is strongly affected by the distance between atomic force microscopy tip and defects/He bubbles. CAFM can accurately detect defects/He bubbles in the W surface layer, however, it is infeasible to measure them in the deep layer (>20 nm), especially due to the existence of defects in the surface layer.

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.