During the repeated cold rolling of Cu/Ni and Ag/Pd multilayers, a solid solution forms at the interfaces as nanoscale layer structure with a composition that replicates the overall multilayer composition. The interfacial mixing behavior was investigated by means of X-ray diffraction and scanning transmission electron microscopy. During deformation induced reaction, the intermixing behavior of the Cu/Ni and Ag/Pd multilayers is in contrast to thermally activated diffusion behavior. This distinct behavior can provide new kinetic pathways and offer opportunities for microstructure control that cannot be achieved by thermal processing.