A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cantilever resonator. The eigenvalue problem is solved to identify the right geometry for the resonators to optimize their resonance frequencies based on mode localization in order to provide outstanding sensitivity. A nonlinear equivalent model is developed using the Euler–Bernoulli beam theory while accounting for the geometric and electrostatic nonlinearities. The sensor's dynamics are explored using a reduced-order model based on two-mode Galerkin discretization, which reveals the richness of the response. To demonstrate the proposed sensing scheme, the dynamic response of the weakly coupled resonator is investigated by tuning the stiffness and mass of the bridge and cantilever resonators, respectively. With its simple and scalable design, the proposed system shows great potential for intelligent multi-sensing detection in many applications.

In the past few decades, advances in micro-electromechanical systems (MEMS) have produced robust, accurate, and high-performance devices. Extensive research has been conducted to improve the selectivity and sensitivity of MEMS sensors by adjusting the device dimensions and adopting nonlinear features. However, sensing multiple parameters is still a challenging topic. Except for the limited research focus on multi-gas and multimode sensing, detecting multiple parameters typically relies on combining several separate MEMS sensors. In this work, a new triple sensing scheme via nonlinear weakly coupled resonators is introduced, which could simultaneously detect three different physical stimuli (including longitudinal acceleration) by monitoring the dynamic response around the first three lowest vibration modes. The Euler–Bernoulli beam model with three-mode Galerkin discretization is used to derive a reduced-order model considering the geometric and electrostatic nonlinearities to characterize the resonator's nonlinear dynamics under the influence of different stimuli. The simulation results show the potential of the nonlinear coupled resonator to simultaneously perform triple detection.