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ITO nanoparticles were generated in the gas phase with a magnetron plasma gas aggregation cluster source. Their morphologies were modified by modulating the discharging power of magnetron sputtering. The shape...

We use gas phase deposition of well-defined nanoparticles (NPs) to fabricate closely-spaced Pd NP arrays on flexible membranes prepatterned with interdigital electrodes (IDEs). The evolution of the morphology and electron conductance of the NP arrays during deposition is analyzed. The growth of two-dimensional percolation clusters of interconnected NPs, which correlate with the percolation pathway for electron conduction in the NP deposits, is demonstrated. The percolative nature of the NP arrays permits us to finely control the percolation geometries and conductance of the NP film by controlling the NP deposition time so as to realize a precise and reproducible fabrication of sensing materials. Electron transport measurements reveal that the electrical conductance of the NP films is dominated by electron tunneling or hopping across the NP percolating networks. Based on the percolative and quantum tunneling nature, the closely-spaced Pd NP films on PET membranes are used as flexible strain sensors. The sensor demonstrates an excellent response ability to distinguish tiny deformations down to 5×10−4 strain and a high sensitivity with a large gauge factor of 200 up to 4% applied strain.