The shape memory effect is the capability of a structure or a material that can be deformed into a certain temporary shape under external stimulus, and the shape will be fixed without the stimulus. The recovery process can be triggered by the same stimulus. The intelligent tunable device based on the shape memory effect has a wide range of applications in many fields. In the optical field, smart diffraction gratings can accomplish in situ optical diffractions according to requirements, meeting the high demand in the next generation of smart optical systems. However, it is essential to construct high-precision grating structures based on shape memory materials. Here, a smart diffraction grating based on UV-curable shape memory polymers (SMPs) via two-beam interference is reported, with nano-scale precision, excellent deformability and recovery ability, and adjustable spectroscopic performance. More importantly, based on the shape memory effect, grating structures that surpass the precision of the fabrication system can be obtained. The smart grating exhibits rapid deformation and recovery upon heating and long-term storage capability, which facilitates them to be applied in optics, electronics, and integrated sensing.

Sapphire nanostructures with a high aspect-ratio have broad applications in photoelectronic devices, which are difficult to be fabricated due to the properties of high transparency and hardness, remarkable thermal and chemical stability. Although the phenomenon of laser-induced periodic surface structures (LIPSS) provides an extraordinary idea for surface nanotexturing, it suffers from the limitation of the small depth of the nanostructures. Here, a high-efficiency self-modulated femtosecond laser hybrid technology was proposed to fabricate nanostructures with high aspect-ratios on the sapphire surface, which was combined backside laser modification and subsequent wet etching. Due to the refractive index mismatch, the focal length of the laser could be elongated when focused inside sapphire. Thus, periodic nanostructures with high-quality aspect ratios of more than 55 were prepared on the sapphire surface by using this hybrid fabrication method. As a proof-of-concept, wafer-scale (∼2 inches) periodic nanostripes with a high aspect-ratio were realized on a sapphire surface, which possesses unique diffractive properties compared to typical shallow gratings. The results indicate that the self-modulated femtosecond laser hybrid technology is an efficient and versatile technique for producing high aspect-ratio nanostructures on hard and transparent materials, which would propel the potential applications in optics and surface engineering, sensing, etc.