The vertical-cavity surface-emitting lasers (VCSELs) with high single-mode (narrow linewidth) output power are essential to minimize chromatic dispersion and to further improve the bit-rate distance product in a multimode fiber, which has a significant propagation loss (∼3.5 dB/km) at 850 nm wavelength. Here, we demonstrate the detailed design considerations and fabrication of a single-mode, high-power, and high-speed VCSELs at the 850 nm wavelength with oxide-relief and Zn-diffusion apertures for the application of short (0.3 km) to medium reach (2 km) optical interconnects. By optimizing the relative geometric sizes between two such apertures in our demonstrated 850-nm VCSELs, we can not only attain high single-mode output power (∼6.5 mW), but also with a reasonable threshold current (< 2.0 mA). Furthermore, the spatial hole burning effect induced low-frequency roll off can also be minimized in our optimized structure to obtain a maximum data rate up to 26 Gbit/s. The record-high bit rate-distance products for OM4 MMF transmission under ON-OFF keying (14 Gbit/s × 2.0 km) modulation formats have been successfully demonstrated by the use of our VCSEL.
We demonstrate novel structures of an 850-nm vertical-cavity surface-emitting laser (VCSEL) array for high output power, single-lobe far-field pattern, and narrow divergence angle. By using the Zn-diffusion process with proper sizes of oxide-current-confined and Zn-diffusion apertures, each unit of VCSEL in the demonstrated array is highly single-mode (side-mode suppression ratio 9 30 dB) with a narrow far-field divergence angle ð9 -10 Þ and high maximum single-mode output power ($6.3 mW). Due to the high uniformity of single-mode performance of each VCSEL unit, the 6 Â 6 array exhibits an excellent lasing phenomenon, which includes single-lobe far-field pattern, weak in-phase coupling, narrowing of divergence angle (from 9 to 4 ), and output power as high as around 104 mW. Furthermore, by measuring the bias-dependent output optical spectra in different positions of our array, the high similarity of these spectra indicates the excellent uniformity of our fabrication process for single-mode VCSEL.
Vertical-cavity surface-emitting laser structures created using oxiderelief and zinc-diffusion techniques enable high-speed multi-mode fiber transmission with ultra-low power consumption.
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