The accuracy of tool setting has a great influence on the machining accuracy of micro structures. In this paper, electric breakdown in micro gap is used for tool setting and the accuracy of this method is ±0.2μm. Experimental studies have been done to prove the feasibility of this method. Experimental results show that the breakdown voltage is about 30V when the gap between the tool and the tool setting probe is 2μm, and tool diameter has little effect on this phenomenon. With the increase of the tool wear the breakdown voltage shows ascendant trend, so this method can be used to monitor tool wear.

In this paper, we propose a method of calculation and optimization concerning the dynamic parameters including its normal stiffness and tangential stiffness. We establish a contact model and a dynamic model based on Hertz contact theory, deriving and calculating its normal stiffness and tangential stiffness. Based on the dynamic parameters obtained, we complete the finite element analysis (FEM) and make the modal experiment. verify the correctness and feasibility of the theory model and the FEM model through comparing the theoretical results with the experimental results. On this basis, we establish the dynamic parameters optimization model based on the ANSYS and MATLAB, and successfully obtain more accurate parameters which provide reliable data for the subsequent analysis.