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In this article, we present a qualitative approach to study the dynamics and stability of micro-machined inductive contactless suspensions (MIS). In the framework of this approach, the induced eddy current into a levitated micro-object is considered as a collection of m-eddy current circuits. Assuming small displacements and the quasi- static behaviour of the levitated micro-object, a generalized model of MIS is obtained and represented as a set of six linear differential equations corresponding to six degrees of freedom in a rigid body by using Lagrange-Maxwell formalism. The linear model allows us to investigate the general stability properties of the MIS as a dynamic system, and these properties are synthesized in three major theorems. In particular, we prove that the stable levitation in the MIS without damping is impossible. Based on the approach presented herewith, we give general guidelines for MIS designing. In addition to we demonstrate the successful application of this technique to study the dynamics and stability of the symmetric and axially symmetric MIS designs both based on 3D micro-coil technology.Comment: 39 pages, 11 figure

In this letter, we present a new hybrid micromachined contactless suspension based on combining electromagnetic inductive and electrostatic actuation. In addition, the stiffness components are dynamically adjusted during the operation phase using a series of electrodes integrated in the contactless suspension structure. We experimentally demonstrate vertical linear positioning of a disk-shaped proof mass in a range from 30 to 200 µm, controlled tilting about two orthogonal axes in the horizontal plane ranges from ±1°to ±4°, as well as controlled oscillation about the vertical axis with an angular displacement of 37°a t a frequency of 1.5 Hz. In order to demonstrate dynamical adjustment of the stiffness, we experimentally show that the angular component of stiffness is increased by a factor of two at a levitation height of 100 µm. Therefore, the suspension dynamics can be changed and adapted to particular applications or to variations in operational environments. Moreover, we demonstrate that this device can operate as a bistable micro-actuator.[2015-0150] Index Terms-Levitation, contactless suspension, frictionless micro-bearings, inductive suspension, electrostatic suspension, bistable, 3D-micro-coils. 1057-7157

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