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A functionally gradient piezoelectric actuator based on PbNi1/3Nb2/3O3-PbZrO3-PbTiO3 (PNN-PZ-PT) system was prepared. The cantilevered actuator consists of a high piezoelectric & low dielectric layer, a low piezoelectric & high dielectric layer and a thin middle diffusion layer. Frequency dependences of impedance were measured from 100Hz to 3MHz. The resonance modes were characterized. A number of low frequency modes were observed and identified as bending resonance. The dimension dependence of resonance frequency of bending resonance was investigated. The results of the measurement were compared with calculated values. There is a good agreement between the determined resonance frequencies and calculated values.

Functionally graded piezoelectric ceramics (FGM) plates are attractive due to their ability to broaden the frequency bandwidth of the ultrasonic transducers. A resistivity gradient La-doped Lead Zirconate Titanate/Al-doped Zinc Oxide (La-PZT/Al-ZnO) piezoelectric ceramics plate was developed using a powder metallurgical process. Grading of the piezoelectric modulus across the plate was experimentally confirmed by the electrical impedance analysis and its gradient distribution was characterized using the profile-technique. The distribution of Zn2+ ions in the PZT region was examined using EPMA, XRD and SEM/EDX, respectively. Analysis results show that the gradient distributions of structural and electrical properties inside the FGM plate are mainly caused by the diffusion and aggregation of Zn2+ ions in the PZT layer. The functionally graded piezoelectric ceramics plate presented here will be useful for broadening the frequency bandwidth of piezoelectric transducers.