The natural compound eye is a striking imaging device with a wealth of fascinating optical features such as a wide field of view (FOV), low aberration, and high sensitivity. Dragonflies in particular possess large, sophisticated compound eyes that exhibit high resolving power and information‐processing capacity. Here, a large‐scale artificial compound eye inspired by the unique designs of natural counterparts is presented. The artificial compound eye is created by a high‐efficiency strategy that combines single‐pulse femtosecond laser wet etching with thermal embossing. These eyes have a macrobase diameter of 5 mm and ≈30 000 close‐packed ommatidia with an average diameter of 24.5 μm. Moreover, the optical properties of the artificial compound eyes are investigated; the results confirm that the eye demonstrates advanced imaging quality, an exceptionally wide FOV of up to 140°, and low aberration.
In this Letter, a novel fabrication of large-area concave microlens array (MLA) on silicon is demonstrated by combination of high-speed laser scanning, which would result in single femtosecond laser pulse ablation on surface of silicon, and subsequent wet etching. Microscale concave microlenses with tunable dimensions and accessional aspherical profile are readily obtained on the 1 cm × 1 cm silicon film, which are useful as optical elements for infrared (IR) applications. The aperture diameter and height of the microlens were characterized and the results reveal that they are both proportional to the laser scanning speed. Moreover, the optical property of high-performance silicon MLAs as a reflective homogenizer was investigated for the visible wavelength, and it can be easily extended to IR light.
Large-area close-packed microlens arrays (MLAs) are highly desirable for structured light and integrated optical applications. However, efficient realization of ultralarge area MLAs with a high fill factor is still technically challenging, especially on glass material. In this Letter we propose a high-efficiency MLA fabrication method using single-pulsed femtosecond laser wet etch and close-packed quasi-periodic concave MLAs consisting of three million units fabricated on silica glass within an hour. The fabricated MLAs are demonstrated to have extreme optical smoothness (∼8.5 nm) by an atomic force microscope. It has also been demonstrated that the profile of the quasi-periodic concave structures could be easily tuned by changing the laser scanning speed or the pulse energy. Additionally, the optical performances of the MLA diffusers were investigated by using sharp focusing, high-resolution imaging, and flat-top illumination.
This Letter demonstrates the direct fabrication of gapless concave microlenses on glass cylinders, which can be used as seamless roller molds for the continuous imprinting of large-area microlens arrays. The method involves femtosecond laser exposures followed by a chemical wet-etching process. A honeycomb-like concave microlens array was fabricated on a glass cylinder with a diameter of 3 mm. We demonstrated the flexibility of the method in tuning the shape and depth of the concave structures by the arrangements of the laser exposure spots and laser powers, and examined the replicating ability of the roller mold by the polymer castling method.
Microlenses with multiple focal lengths play an important role in three-dimensional imaging and the real-time detection of unconfined or fluctuating targets. In this Letter, we present a novel method of fabricating lens-on-lens microstructures (LLMs) using a two-step femtosecond laser wet etching process. A 3×3 LLM array was made with a diameter of 129.0 μm. The fabricated LLM has two focal lengths, 80.4 and 188.7 μm, showing excellent two-level focusing and imaging abilities. Its size and focal length can be controlled by adjusting laser power and etching time. Its surface roughness remains about 61 nm. This simple and efficient method for large-scale production of LLMs has potential applications in diverse optical systems.
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