No abstract

The method of plasma electron spectroscopy (PLES) is further developed for the analysis of impurities of organic molecules and ammonia in this work. In particular, for the first time the PLES method was used to detect the hydrocarbons impurities: alkanes (methane) and alkenes (ethylene), as well as their derivatives alcohols (ethanol), radicals, and ammonia. As the energies of the registered characteristic electrons are different for different chemical compounds, an important advantage of the PLES method is the fact that it allows simultaneous (in one measurement) registration of various impurities. This work presents a prototype of a PLES-gas analyzer based on nonlocal plasma of negative glow of a short glow discharge in helium.

No abstract

No abstract

Based on a sandwich-like structure, a microhollow cathode discharge device is designed, and a stable discharge is realized by injecting helium into the discharge region of the device at atmospheric pressure. A wall probe is used to determine the relevant parameters of the plasma generated by the device, such as particle density, electron temperature, and the electron distribution function. At the same time, a sink parameter is used to correct the electron distribution function of the wall-probe diagnostics, and to further study the relationship between electron density and the electron temperature of the corrected electron distribution function.