A novel hybrid-type XYθz micropositioning mechanism driven by piezoelectric actuators is proposed in this paper. With the purpose of realizing a large motion range and 3-DoF independent motion within a compact size, the mechanism is designed using a symmetric translational part and a rotational part that are linked serially. The translational part is based on a double-amplification mechanism incorporating a guidance mechanism for decoupling; the rotational part uses a nonuniform beam with an amplification mechanism to translate the linear output displacement of piezoelectric actuators into a large rotational angle around the Z axis. To precisely predict the output displacements and implement dimensional design, electromechanical models of the translational mechanism and rotational mechanism are established. According to the theoretical model, dimensional optimization is carried out to achieve large motion ranges within a compact size. A prototype of the proposed mechanism is fabricated according to the optimized results, and the performance of the mechanism is validated by experiment. The experimental results show that translational travel in X and Y directions of 204.2 μm and 212.8 μm, respectively, and travel of 8.7 mrad in the θz direction can be realized in a small size of 106 mm × 106 mm × 23 mm. And, the output coupling was evaluated to be below 3%, indicating an excellent decoupling performance.

Mirror-scanning mechanisms are a key component in optical systems for diverse applications. However, the applications of existing piezoelectric scanners are limited due to their small angular travels. To overcome this problem, a novel two-axis mirror-scanning mechanism, which consists of a two-axis tip-tilt flexure mechanism and a set of piezoelectric actuators, is proposed in this paper. The focus of this research is on the design, theoretical modeling, and optimization of the piezoelectric-driven mechanism, with the goal of achieving large angular travels in a compact size. The design of the two-axis tip-tilt flexure mechanism is based on two nonuniform beams, which translate the limited linear output displacements of the piezoelectric actuators into large output angles. To exactly predict the angular travels, we built a voltage-angle model that characterizes the relationship between the input voltages to the piezoelectric actuators and the output angles of the piezoelectric-driven mechanism. Using this analytical model, the optimization is performed to improve the angular travels. A prototype of the mirror-scanning mechanism is fabricated based on the optimization results, and experiments are implemented to test the two-axis output angles. The experimental result shows that the angular travels of the scanner achieve more than 50 mrad, and the error between the analytical model and the experiment is about 11%. This error is much smaller than the error for the model built using the previous method because the influence of the stiffness of the mechanical structure on the deformation of the piezoelectric stack is considered in the voltageangle model.

Tilt-positioning mechanisms are required in optical systems for diverse applications. Compared to electromagnetic tilt-positioning mechanisms, piezoelectric tilters are superior with regard to high positioning resolution, cost-effectiveness, and no electromagnetic interference issues. But their applications are limited by small motion ranges. To overcome this problem, a novel piezoelectric tilt-positioning mechanism is proposed and developed in this paper, aiming to achieve a large output range in compact size. Serving this purpose, flextensional piezoelectric actuators (FPAs) are employed in this mechanism and their optimal structure is pursued. The existing approach to model and analyze the structure of FPAs is not perfect, making it challenging to exactly characterize and optimize actuator performance for its applications. To address this problem, a hybrid-body model of the FPAs is developed and based on this model, a governing equation is established to exactly and comprehensively characterize their kinematic performance. This equation allows the application requirement to be readily related to the actuator design, enabling the optimization of tilter design and the actuators. Using the optimized parameters, an experimental prototype is fabricated. This specimen achieved more than 15 mrad of angular travel at a small size of 35 × 42 × 42 mm, and the error between the analytical model and the experiment was less than 5%. These results support the accuracy of the hybrid-body model and indicate that the proposed tilter is very promising for practical applications.

Compliant amplifying mechanisms are used widely in high-precision instruments driven by piezoelectric actuators, and the dynamic and static characteristics of these mechanisms are closely related to instrument performance. Although the majority of existing research has focused on analysis of their static characteristics, the dynamic characteristics of the mechanisms affect their response speeds directly. Therefore, this paper proposes a comprehensive theoretical model of compliant amplifying mechanisms based on the multi-body system transfer matrix method to analyze the dynamic and static characteristics of these mechanisms. The effects of the main amplifying mechanism parameters on the displacement amplification ratio and the resonance frequency are analyzed comprehensively using the control variable method. An iterative optimization algorithm is also used to obtain specific parameters that meet the design requirements. Finally, simulation analyses and experimental verification tests are performed. The results indicate the feasibility of using the proposed theoretical compliant amplifying mechanism model to describe the mechanism’s dynamic and static characteristics, which represents a significant contribution to the design and optimization of compliant amplifying mechanisms.