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Structural phase changes in a titanium-silicon system treated by low energy high current elec tron beams (HCEBs) and compression plasma flows (CPFs) with the duration 100 µs and the energy density 12-15 J/cm 2 are studied. Scanning electron microscopy, X ray diffraction and electron microprobe analysis are used in this work. The formation of a titanium doped silicon layer 10-25 µm thick, titanium silicides (TiSi 2 under HCEBs and Ti 5 Si 3 under CPF treatment), silicon dendrites, and needle like eutectics (typical size of precipitates is about 50 nm) is revealed. It is shown via the results of numerical simulation that the thickness of the metal doped layer is mainly controlled by the power density value and the surface nonuni formity of the heat flow over the target surface. The thermodynamic regularities of phase formation are dis cussed, taking into account heat transfer between the silicide nuclei and solid silicon.