An improved technique for thermal resistance mea-
surement of edge-emitting diode lasers using spontaneous emission
spectra, collected through the opening in the n-contact within the
range of operating currents, has been proposed. The advantage
of the proposed technique is that systematic errors typical for
measurements based on lasing spectra are excluded. The accuracy
of the method was verified by measuring the dependence of
the thermal resistance on the cavity length for diode lasers with
100 μm strip width. Obtained results are in good agreement with
the model, and the minimum measurement error was ±0.1 K/W.
The proposed technique can be used in metrological support of
fabrication process of semiconductor lasers.