The self-assembled GeSi nanoislands built into the semiconductor-insulator interface of the MOS-structures based on Si(001) with SiOx and ZrO2(Y) oxide layers deposited by magnetron sputtering have been shown to initiate bipolar resistive switching without preliminary electroforming. The current-voltage curves and electrical parameters of the MOS-structures in the high-resistance state and in the low-resistance state have been studied. A change in the built-in charge in the dielectric near the insulator-semiconductor interface during resistive switching is established and associated with the formation and destruction of conductive filaments. The light-stimulated resistive switching of MOS-structures with ZrO2(Y) layer from the high-resistance to the low-resistance state is observed, which is associated with an increase in the conductivity of the space-charge region in the Si substrate due to interband optical absorption in Si, which causes a voltage redistribution between Si and ZrO2(Y) layer. A difference in the shape of the small signal photo-voltage spectra of MOS-structures is found in the spectral region of intrinsic photosensitivity of Si in the high and low resistance states due to the leakage of photo-excited charge carriers from Si to the metal electrode through filaments.

A comparative study of the effect of pulsed γ-neutron irradiation on the photosensitivity spectra of Si p – n photodiodes with active layers based on self-assembled GeSi nanoisland arrays and Ge epitaxial layers is performed. The irradiation of photodiodes with GeSi nanoislands is found to not lead to photosensitivity degradation in the spectral region of interband optical absorption in nanoislands (wavelength range of 1.1–1.7 μm). At the same time, a steady decrease in the intrinsic photosensitivity of Si and the photosensitivity of photodiodes based on Ge epitaxial layers with an increase in irradiation dose is observed. This effect is attributed to the accumulation of radiation-induced defects in the Si matrix and deep in Ge epitaxial layers, respectively.