A model of interaction of gold nanoislands during chemical vapor deposition in vacuum both in the presence of charges in the vapor and after their removal has been considered. A growth stage has been revealed (the mean sediment thickness is more than 2 nm) in which the mutual attraction of gold nanoislands and a sharp increase in their sizes is observed. In this stage, the sediment with removed charges exhibits retardation of the nanoisland growth. The influence of the substrate geometric profile on the sediment morphology is demonstrated. These investigations are promising for development of methods for nanocoating segmentation and formation of ordered nanoisland ensembles.