In this work high-resolution transmission electron microscopy (HRTEM) studies of germanium powder obtained as a result of processing in a planetary mill in the presence of (5-25%) of diamond powder have been performed. As a result of processing sample contains twins on {111} plane and packaging defects in germanium. Phase 9R was detected in which the following sequence of layers takes place: ...BABCBCACA... In some particles, there was a partial or complete phase transition of GeI → GeIV and GeI → GeIII.