The results of the study of the possibilities of the Rutherford backscattering spectrometry (RBS) for analysis of a multilayer structure containing nanometer scale layers with elements of similar masses are presented. It is shown that RBS allows to measure the composition of such structures, as well as the film thickness as a whole and the thickness of individual layers with a sufficiently high accuracy, and can be used as an input control of technological structures used in micro- and nanotechnologies.