Abstract-In many areas of signal, system, and control theory, orthogonal functions play an important role in issues of analysis and design. In this paper, it is shown that there exist orthogonal functions that, in a natural way, are generated by stable linear dynamical systems and that compose an orthonormal basis for the signal space e;. To this end, use is made of balanced realizations of inner transfer functions. The orthogonal functions can be considered as generalizations of, e.g., the pulse functions, Laguerre functions, and Kautz functions, and give rise to an alternative series expansion of rational transfer functions. It is shown how we can exploit these generalized basis functions to increase the speed of convergence in a series expansion, i.e., to obtain a good approximation by retaining only a finite number of expansion coefficients. Consequences for identification of expansion coefficients are analyzed, and a bound is formulated on the error that is made when approximating a system by a finite number of expansion coefficients.

Next-generation precision motion systems are lightweight to meet stringent requirements regarding throughput and accuracy. Such lightweight systems typically exhibit lightly damped flexible dynamics in the controller cross-over region. State-of-the-art modeling and motion control design procedures do not deliver the required model complexity and fidelity to control the flexible dynamical behavior. The aim of this paper is to develop a combined system identification and robust control design procedure for high performance motion control and apply it to a wafer stage. Hereto, new connections between system identification and robust control are employed. The experimental results confirm that the proposed procedure significantly extends existing results and enables next-generation motion control design.

In this paper, the feedforward controller design problem for high-precision electromechanical servo systems that execute finite time tasks is addressed. The presented procedure combines the selection of the fixed structure of the feedforward controller and the optimization of the controller parameters by iterative trials. A linear parametrization of the feedforward controller in a two-degree-of-freedom control architecture is chosen, which results in a feedforward controller that is applicable to a class of motion profiles as well as in a convex optimization problem, with the objective function being a quadratic function of the tracking error. Optimization by iterative trials avoids the need for detailed knowledge of the plant, achieves the controller parameter values that are optimal with respect to the actual plant, and allows for the adaptation to possible variations that occur in the plant dynamics. Experimental results on a high-precision wafer stage and a desktop printer illustrate the procedure.

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