This article presents the features of functioning the cyber-physical systems and their components. The possibility to connect measuring devices of electrical quantities, measuring devices of non-electrical quantities, and sensors with data interface to cyber-physical systems components is considered. The analysis opportunity of sensors possible accession to embedded system control is examined. The classification by the sensors output signal type is considered. On the basis of the sensors classification concluded that the cyber-physical systems is most expedient to use intelligent sensors. According to the results of the analysis of the cyber-physical system characteristics and components a multilevel remote metrological verification of cyber-physical systems is proposed. With the proposed algorithm the cyber-physical system components can be verified at the request of any component, subsystem or system as a whole. Also a person can initiate a metrological testing process, if there is suspicion of incorrect operation or its time for cyber-physical system routine verification.