Представлены результаты исследования тонкопленочных образцов твердого электролита LiPON, полученных методом магнетронного нанесения. Приведены данные о морфологии, структуре, элементном и фазовом составе пленок LiPON и результаты исследования их электрофизических параметров. DOI: 10.21883/PJTF.2017.11.44690.16637

The design description and test results of an all solid-state thin-film lithium-ion battery are provided. It is shown that the features of its charge-discharge characteristics are associated with a change in the Fermi level of the electrodes and are caused by a change in the concentration of lithium ions in the course of the charge-discharge. The specific capacitive characteristics of the layout are determined, which are comparable with the characteristics of industrial solid-state lithium-ion batteries.