The optical, mechanical, and thermal properties of freestanding films based on nitrided molybdenum and zirconium disilicides were investigated. It has been shown that nitriding of silicides leads to a significant increase in the thermal stability of the films. So, if crystallization of initially amorphous freestanding MoSi2 or ZrSi2 films is observed at temperatures of 330-370°C, the introduction of nitrogen into the film makes it possible to increase the temperature up to 600-700°С at which MoSi2Nx and ZrSi2Ny (at least for x ≥ 0.25, y ≥ 1.3) films can be used for many hours when heated under vacuum. The study of mechanical tensile strength showed that the ultimate strength is weakly dependent on the nitrogen content in MoSi2Nx films (0 ≤ x ≤ 0.55). Comparison of the properties of MoSi2Nx and ZrSi2Ny films obtained by the magnetron method at the same nitrogen partial pressure demonstrated that at similar values of the transmittance at 13.5 nm, nitrated ZrSi2 films are more effective as protective coatings (less susceptible to oxidation and more resistant to degradation at high temperatures).

Приведены результаты исследований многослойных зеркал Mo/Si с межслоевыми прослойками B 4 C и Be в окрестности длины волны 13.5 nm. Показано, что четырехкомпонентное многослойное зеркало типа Mo/Be/Si/B 4 C по коэффициенту отражения превосходит на 2% зеркало Mo/Si и на 1.3% зеркало Mo/Si/B 4 C. Также это зеркало обеспечивает наибольшую спектральную полосу пропускания на полувысоте ( λ 1/2 = 0.535 nm). Дано объяснение этим эффектам.Ключевые слова: рентгеновское излучение, многослойные зеркала, магнетронное распыление.