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Background. FePt based nanoscale films compositions with an ordered hard magnetic L1 0 -FePt phase provide a perspective material for ultrahigh-density magnetic recording. An ordered L1 0 -FePt phase is formed from a disordered A1-FePt phase during high-temperature annealing or films deposition on a heated substrate. However for practical application of these materials it is necessary to reduce the formation temperature of L1 0 -FePt phase, and also to get preferred grain orientation structure. Objective. The investigation of the annealing atmosphere influence on the formation of structural and phase compositions in FePt films with Cu intermediate layer.Methods. Film compositions were obtained by magnetron sputtering, structure before and after heat treatment was investigated by X-ray diffraction methods. Results. Using X-ray phase analysis it was found that regardless of the annealing atmosphere composition of in