No abstract

A novel method for simultaneous measurement of multi-degree-of-freedom geometric errors is presented based on laser collimation technique. A single-mode fiber-coupled laser module is used as source and a corner-cube prism and a splitting rectangular prism are adopted in the moving target to sense the straightness errors and angular errors, respectively. In this way, the horizontal and vertical straightness errors as well as pitch, yaw and roll angle errors can be measured simultaneously. Meanwhile, the moving part is wireless. The theoretical analysis and experimental results show that the method is feasible. With the supposed system parameters, the resolution the straightness, pitch, yaw and roll angle error, can reach to 0.1 μm , 0.1″ and 0.3″ , respectively.

No abstract

No abstract