2002
DOI: 10.1016/s0038-1101(01)00120-4
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0.25 μm fully depleted SOI MOSFETs for RF mixed analog-digital circuits, including a comparison with partially depleted devices with relation to high frequency noise parameters

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Cited by 20 publications
(16 citation statements)
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“…When including a dVTH = ± 3crYTH variation around the nominal VTH value in FD SOl, a difference of about 20 % is obtained for the delay between the best case and the worst case for both design styles (Table 8), which is indeed larger than the 10 % we obtained in bulk. By a better control of the uniformity of the silicon film thickness and related fabrication steps, this effect can be reduced as shown in [6]. Moreover, FD SOl cells do not show additional delay variations due to the floating-body effects as in PD SOl and remain much faster than bulk cells, even in the worst case.…”
Section: Fully-depleted Sol 025 /Lmmentioning
confidence: 99%
“…When including a dVTH = ± 3crYTH variation around the nominal VTH value in FD SOl, a difference of about 20 % is obtained for the delay between the best case and the worst case for both design styles (Table 8), which is indeed larger than the 10 % we obtained in bulk. By a better control of the uniformity of the silicon film thickness and related fabrication steps, this effect can be reduced as shown in [6]. Moreover, FD SOl cells do not show additional delay variations due to the floating-body effects as in PD SOl and remain much faster than bulk cells, even in the worst case.…”
Section: Fully-depleted Sol 025 /Lmmentioning
confidence: 99%
“…Los dispositivos FDSOI analizados han sido fabricados en el LETI de Grenoble, Francia. A continuación vamos a mencionar algunos detalles acerca del proceso de fabricación [Vanmackelberg et al 2002]. Como indicamos anteriormente, el material de partida son obleas UNIBOND  , en este caso con diámetro de 200 mm y un espesor del óxido enterrado de 0.4 µm.…”
Section: Vi2 A) Fabricación De Los Dispositivosunclassified
“…Los parámetros dinámicos y de ruido que mostraremos en este capítulo fueron obtenidos empleando un analizador de redes HP8510, un sistema de medidas de ruido HP8971 y sondas para microondas Cascad con contacto de Tungsteno [Vanmackelberg et al 2002]. Con el objetivo de minimizar la influencia del ruido del receptor en las medidas de ruido, se emplearon aislantes de alta calidad.…”
Section: B) Procedimiento De Medida Y Extracción De Parámetrosunclassified
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