100 kHz MEMS Vibratory Gyroscope

Liewald, Jan-Timo; Kuhlmann, Burkhard; Balslink, Thorsten; Trächtler, Martin; Dienger, Matthias; Manoli, Yiannos

doi:10.1109/jmems.2013.2264433

Cited by 25 publications

(12 citation statements)

References 26 publications

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“…The direct application of an axial force on the gauges proves challenging from a design point of view, as a 5-μm-long NEMS gauge has an axial stiffness of thousand N/m, which makes it difficult to cope with typical resonance frequencies in the order of few tens kHz [22]. When using NEMS gauges as readout elements, it is therefore necessary to exploit a lever system to transfer the inertial force to one gauge end, while the other end is anchored.…”

Section: B Lever System Configuration For Sensingmentioning

confidence: 99%

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Dellea

Giacci

Longoni

et al. 2015

J. Microelectromech. Syst.

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This paper presents a new design and a complete characterization of amplitude-modulation gyroscopes based on piezoresistive nanogauges. The working principle and optimization criteria of in-plane and out-of-plane devices relying on double frame decoupling and levered sense mode are discussed in light of sensitivity and resolution theoretical predictions. The architecture of driving and sensing electronics is also presented. The reduced thermo-mechanical damping with respect to capacitive configurations, and the inherently high output signal leads to white noise performance in the mdps/ √ Hz range within an area smaller than 0.35 mm 2 , at pressures in the millibar range. Sub-5-ppm linearity errors within 1000 dps are also demonstrated.[2015-0064]

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Section: B Lever System Configuration For Sensingmentioning

confidence: 99%

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Dellea

Giacci

Longoni

et al. 2015

J. Microelectromech. Syst.

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“…MEMS operation is often based on micro-scale movable parts oscillating at specific resonance frequencies [12,13] that are affected by external vibrations that introduce undesired noise and can even compromise the right functioning [14,15]. Isolation of MEMS from such external vibrations is essential for their correct functioning [16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Microstructured Phononic Crystal Isolates from Ultrasonic Mechanical Vibrations

et al. 2022

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The functioning of many micro-electromechanical devices with parts oscillating at high frequencies require isolation from external vibration. Phononic crystals, presenting band-gaps in the dispersion spectrum, i.e., interval of frequency in which propagating waves are attenuated, can provide an effective solution for vibration shielding at the microscale. In the present work, we design—through numerical simulations—a 3D phononic crystal with a micrometric unit cell able to work as vibration isolator for a micro system. We exploit the direct writing technique based on two-photon polymerization to realize three prototypes of different dimensions. Experimental measurements performed with a Michelson interferometer demonstrate the effectiveness of the proposal.

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“…The precision of MEMS gyroscopes has improved a lot in the last decade, reaching a tactical grade level [ 1 , 2 , 3 , 4 ]. Being of small size, low cost and light weight, MEMS gyros have been applied to more and more areas, such as in inertial navigation, roller detection, automotive safety, industrial control, railway siding detection, consumer electronics and stability control systems [ 4 , 5 , 6 ]. During use, the acceleration along the sense axis causes great errors in the MEMS gyroscope output signal, and the dual-mass gyroscope structure effectively prevents this phenomenon from occurring by employing differential detection technology.…”

Section: Introductionmentioning

confidence: 99%

Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods

Cao

Kou

et al. 2016

Sensors

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This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses’ quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups’ output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability.

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100 kHz MEMS Vibratory Gyroscope

Cited by 25 publications

References 26 publications

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

Microstructured Phononic Crystal Isolates from Ultrasonic Mechanical Vibrations

Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods

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