11E-2 Review and Comparison of Bulk Acoustic Wave FBAR, SMR Technology

Ruby, R.

doi:10.1109/ultsym.2007.262

Cited by 222 publications

(97 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Since the energy in reflection layers can not be converted into the electrical energy, which decreases the electromechanical conversion efficiencies, the k 2 t,eff of the device is smaller than that of the FBAR. The Qs is slightly lower than that of the conventional FBAR [16], which is mainly due to the the energy leakages and the damping losses of the additional reflection layers.…”

Section: Resultsmentioning

confidence: 88%

A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications

et al. 2015

View full text Add to dashboard Cite

Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physical or biochemical sensing. In this work, a new architecture of BAW resonator is demonstrated, which introduces a pair of reflection layers onto the top of a thin film bulk acoustic resonator (FBAR) device. The new device can be transformed between type I and type II dispersions by varying the thicknesses of the reflection layers. A computational modeling is developed to fully investigate the acoustic waves and the dispersion types of the device theoretically. The novel structure makes it feasible to fabricate both type resonators in one filter, which offers an effective alternative to improve the pass band flatness in the filter. Additionally, this new device exhibits a high quality factor (Q) in the liquid, which opens a possibility for real time measurement in solutions with a superior limitation of detection (LOD) in sensor applications.

show abstract

Section: Resultsmentioning

confidence: 88%

A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications

et al. 2015

View full text Add to dashboard Cite

show abstract

“…These devices consist of a piezoelectric layer sandwiched between two metal electrodes to which a microwave (RF) signal is applied [9]. Standing acoustic waves with a well-defined resonant frequency, / r , are generated by the microwave signal due to the inverse piezoelectric effect.…”

Section: Introductionmentioning

confidence: 99%

“…In 1972, it was utilised for the first time to detect antibodies [11]. QCMs have a mass detection limit of a few nanograms, which is limited by low operation frequency (5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20) due to the quartz substrate thickness. In this respect, the utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), extremely high frequency versions QCM with an operating frequency in the range of a few GHz, offers great potential to improve the sensitivity and detection limit of gravimetric sensors.…”

Section: Introductionmentioning

confidence: 99%

AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

Garcia‐Gancedo

Zhu

Iborra

et al. 2011

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

ARTICLE INFO ABSTRACTSolidly mounted resonators (SMRs) with a top carbón nanotubes (CNTs) surface coating that doubles as an electrode and as a sensing layer have been fabricated. The influence of the CNTs on the frequency response of the resonators was studied by direct comparison to identical devices with a top metallic electrode. It was found that the CNTs introduced significantly less mass load on the resonators and these devices exhibited a greater quality factor, Q.(>2000, compared to ~1000 for devices with metal electrodes), which increases the gravimetric sensitivity of the devices by allowing the tracking of smaller ~ " frequency shifts. Protein solutions with different concentrations were loaded on the top of the resonators Keywords' Biosensor anc ' me ' r res P onses to mass-load from physically adsorbed coatings were investigated. Results show Carbón nanotube (CNT) tnat resonators using CNTs as the top electrode exhibited a higher frequency change for a given load Aluminum nitride (A1N) (~0.25 MHz cm 2 ng _1 ) compared to that of a metal thin film electrode (~0.14 MHz cm 2 ng _1 ), due to the Bulk acoustic wave resonator (BAW) lower mass of the CNT electrodes and their higher active surface área compared to that of a thin film Gravimetric biosensor metal electrode. It is therefore concluded that the use of CNT electrodes on resonators for their use as gravimetric biosensors is a significant improvement over metallic electrodes that are normally employed.

show abstract

“…An optional design is the film bulk acoustic resonator (FBAR) device, which consists of a sub micrometer thick piezoelectric film membrane located between two metallic layer electrodes (134,135). Having a smaller size, high power tolerance and high sensitivity, it has attracted attention in the research field.…”

Section: Recent Achievements In Zno Nanocrystal Based Biosensorsmentioning

confidence: 99%