A novel high performance trench field stop (TFS) superjunction (SJ) insulated gate bipolar transistor (IGBT) with a buried oxide (BO) layer is proposed in this paper. The BO layer inserted between the P-base and the SJ drift region acts as a barrier layer for the hole-carrier in the drift region. Therefore, conduction modulation in the emitter side of the SJ drift region is enhanced significantly and the carrier distribution in the drift region is optimized for the proposed structure. As a result, compared with the conventional TFS SJ IGBT (Conv-SJ), the proposed BO-SJ IGBT structure possesses a drastically reduced on-state voltage drop (V ce(on) ) and an improved tradeoff between V ce(on) and turn-off loss (E off ), with no breakdown voltage (BV ) degraded. The results show that with the spacing between the gate and the BO layer W o = 0.2 µm, the thickness of the BO layer L o = 0.2 µm, the thickness of the drift region L d = 90 µm, the half width and doping concentration of the N-and P-pillars W n = W p = 2.5 µm and N n = N p = 3 × 10 15 cm −3 , the V ce(on) and E off of the proposed structure are 1.08 V and 2.81 mJ/cm 2 with the collector doping concentration N c = 1 × 10 18 cm −3 and 1.12 V and 1.73 mJ/cm 2 with N c = 5 × 10 17 cm −3 , respectively. However, with the same device parameters, the V ce(on) and E off for the Conv-SJ are 1.81 V and 2.88 mJ/cm 2 with N c = 1 × 10 18 cm −3 and 1.98 V and 2.82 mJ/cm 2 with N c = 5 × 10 17 cm −3 , respectively. Meanwhile, the BV of the proposed structure and Conv-SJ are 1414 V and 1413 V, respectively.