1993
DOI: 10.1063/1.110644
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18O diffusion through amorphous SiO2 and cristobalite

Abstract: Secondary ion mass spectrometry was used to profile the diffusion of oxygen in polycrystalline β-cristobalite and vitreous SiO2. The tracer concentration profiles of cristobalite are consistent with a model based on two mechanisms: bulk and short-circuit diffusion. The profiles of partially crystallized samples containing vitreous SiO2 and β-cristobalite were fitted using the sum of two complementary error functions and taking account of some interstitial-network exchange. The bulk oxygen diffusivity, in the t… Show more

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Cited by 66 publications
(56 citation statements)
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“…Although no data are available for amorphous HfO 2 , a faster diffusion in amorphous HfO 2 is expected due to the lower mass density than in crystalline HfO 2 (typical values of 7 g/cm 3 for amorphous films as compared with 9.7 g/cm 3 for the monoclinic phase [23]). This conclusion is supported by oxygen diffusion data in amorphous and crystalline SiO 2 [26,27], where the oxygen diffusion rate is a factor of 5 higher in the amorphous state (but this was reported for rather high temperatures of 1240-1500 C) [26]. According to our structural investigations, the amorphous phase is gradually replaced by crystalline monoclinic phase within the temperature range from 400 C to 500 C. The decrease in the rate of the oxygen diffusion in the film becomes stronger due to the crystallization than the increase due to the temperature increase.…”
Section: Discussionsupporting
confidence: 71%
“…Although no data are available for amorphous HfO 2 , a faster diffusion in amorphous HfO 2 is expected due to the lower mass density than in crystalline HfO 2 (typical values of 7 g/cm 3 for amorphous films as compared with 9.7 g/cm 3 for the monoclinic phase [23]). This conclusion is supported by oxygen diffusion data in amorphous and crystalline SiO 2 [26,27], where the oxygen diffusion rate is a factor of 5 higher in the amorphous state (but this was reported for rather high temperatures of 1240-1500 C) [26]. According to our structural investigations, the amorphous phase is gradually replaced by crystalline monoclinic phase within the temperature range from 400 C to 500 C. The decrease in the rate of the oxygen diffusion in the film becomes stronger due to the crystallization than the increase due to the temperature increase.…”
Section: Discussionsupporting
confidence: 71%
“…The rates of oxygen diffusion in crystalline SiO 2 are slower than in amorphous SiO 2 . Oxygen diffusion was experimentally determined to be slower in ␤-cristobalite than in vitreous silica, with diffusion coefficients equal to 1.96 × 10 −12 cm 2 s −1 and 3.35 × 10 −12 cm 2 s −1 , respectively at 1800 K. 30 The crystallization of the oxide grown over chemically vapordeposited SiC at 1573 K is responsible for a decrease in the oxidation rate by a factor of ∼30 8 . The nature of the silica scale should then significantly modify the oxidation behavior and affect the oxidant diffusivity.…”
Section: Discussionmentioning
confidence: 99%
“…The volume fraction of Ta [36] at 1300 C) within the oxide scale formed on the TaSi 2 -Si 3 N 4 nanocomposite coating is much smaller than that on the monolithic TaSi 2 coating. This can be explained by the role of Si 3 N 4 phase in Eq.…”
Section: Oxidation Behavior Of Tasi 2 -Si 3 N 4 Nanocomposite Coatingmentioning
confidence: 93%