“…Recently, many research groups have been reported that InGaZnO (IGZO) TFTs on polyimide plastic substrate have already obtained similar TFT performance such as electron mobility and I on /I off ratio, excellent uniformity, and good transparency compared to rigid substrates. 3,4 Most of the amorphous-IGZO based TFTs are still fabricated at relatively high process temperatures, typically above 300 C, to obtain the high quality gate insulator deposited chemical vapor deposition and the energy for activation for IGZO channel. This requires a thermally stable plastic substrate, e.g., polyimide, 1,5 which is expensive and has low optical transparency.…”