26.3: Investigation of the Bow of Silicon Backplanes for Microdisplay Applications

Abstract

The optical performance of ferroelectric liquid crystal over silicon (FLCOS) microdisplay devices can be greatly improved by ensuring that the silicon backplane that forms the core of the display engine is both smooth and flat. In this paper we investigate the effect of the circuit design and manufacturing process on the bow of the silicon CMOS drive circuitry.