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An emissive microdisplay technology has been developed which incorporates a layer of light emitting polymer on a CMOS substrate. Monochrome microdisplays of QVGA (320 × 240) resolution have been manufactured and early aspects of their initial characterization are presented. Benefits of the technology include very low power consumption plus relatively simple drive electronics and opto‐mechanics.

Liquid-crystal over silicon is an established technology for reflective spatial light modulators and microdisplays. This paper reviews their development to date, highlighting in particular the micromachining of the mirror array and the associated packaging issues.

We describe the fabrication and testing of deformable membrane mirrors over silicon backplanes using our in-house CMOS processing facilities. The fabrication of dense arrays of electrostatic actuators on the backplane potentially allows finer control ofthe membrane surface shape than can be produced when using a printed circuit board as the backplane. We present a range of techniques for fabricating the membrane mirrors in various materials and mating the structure to a silicon backplane. We characterise membrane deflection with electric field for silicon nitride and polymer membranes over a passive silicon backplane consisting of37 directly-addressed electrode pads configured in a hexagonal array.

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