2019
DOI: 10.3390/mi10040259
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3-D Design and Simulation of a Piezoelectric Micropump

Abstract: The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid–structure inter… Show more

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Cited by 28 publications
(12 citation statements)
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“…Another recent study analyzed the theoretical performance of a piezoelectric micropump for drug delivery applications ( Farshchi Yazdi et al, 2019 ). The proposed micropump is based on silicon diaphragms actuated at 60 V and on flow input and output passive valves.…”
Section: Implantable Mems Drug Delivery Devicesmentioning
confidence: 99%
“…Another recent study analyzed the theoretical performance of a piezoelectric micropump for drug delivery applications ( Farshchi Yazdi et al, 2019 ). The proposed micropump is based on silicon diaphragms actuated at 60 V and on flow input and output passive valves.…”
Section: Implantable Mems Drug Delivery Devicesmentioning
confidence: 99%
“…Generally, piezoelectric micro-pumps are divided into two categories: with and without valves. Valve-less piezoelectric micropumps were studied experimentally and numerically [ 12 , 13 , 14 ]. The piezoelectric micro-pumps equipped with valves consist of a pumping chamber with a diaphragm (pumping membrane), a microchannel and two check valves [ 15 , 16 , 17 ].…”
Section: Introductionmentioning
confidence: 99%
“…The application of piezoelectric materials in "smart" microsystems [1] is continuously increasing, with different possible uses of both "direct" (conversion of mechanical energy into electric energy) and "converse" effect [2]. The latter is applied for actuating purposes, for example, in the case of micropumps [3][4][5]; "converse" effect is now widely used for energy harvesting, namely for obtaining an electric power by exploiting some freely available mechanical energy [6,7].…”
Section: Introductionmentioning
confidence: 99%