2002
DOI: 10.1016/s0040-6090(02)00283-3
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3-D focused ion beam mapping of nanoindentation zones in a Cu–Ti multilayered coating

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Cited by 29 publications
(22 citation statements)
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“…To analyse these 3D volumes in a reasonable time, a microscope magnification of 3700-5000× was used, and the separation, z, of the 2D FIB sections was ∼0.8 m. The 2D SE images were aligned and corrected for drift using cross-correlation of features on the surfaces of the sample. [14][15][16] Cracks were identified and traced in each 2D section, and a mesh was generated to interpolate between sequential sections and display the analysed 3D volume using IMOD software. [17][18][19] 3.…”
Section: Microstructural and Fib Tomographic Analysismentioning
confidence: 99%
See 1 more Smart Citation
“…To analyse these 3D volumes in a reasonable time, a microscope magnification of 3700-5000× was used, and the separation, z, of the 2D FIB sections was ∼0.8 m. The 2D SE images were aligned and corrected for drift using cross-correlation of features on the surfaces of the sample. [14][15][16] Cracks were identified and traced in each 2D section, and a mesh was generated to interpolate between sequential sections and display the analysed 3D volume using IMOD software. [17][18][19] 3.…”
Section: Microstructural and Fib Tomographic Analysismentioning
confidence: 99%
“…[12][13][14][15][16] The 3D FIB tomography method involves milling serial cross-sections through a surface by FIB, imaging each sequential 2D section (typically by secondary electrons (SE)), and then aligning the 2D images of the sectioned material to reconstruct the 3D microstructure using specialized software (e.g. IMOD, IDL or Amira).…”
Section: Introductionmentioning
confidence: 99%
“…To properly align several microns of materials, reproducible spacing, fiduciary mark and high resolution image must be adequate [76,77]. The ion beam slices materials with the spacing of several tens of nanometers, additionally, fiduciary marks are produced as reference points of the image alignment, and the sectioned image taken by the e-beam has a submicron scale of lateral spatial resolution [78,62].…”
Section: Focused Ion Beam/ Scanning Electron Microscopy (Fib/sem)mentioning
confidence: 99%
“…area is not measured by atomic force microscopy (see e.g. [8,9,24,[32][33][34][35][36]). Our simulation method inherently takes into account this material pile-up, caused by the dislocations (see e.g.…”
Section: The Effect Of Grain Boundariesmentioning
confidence: 99%