2013
DOI: 10.1016/j.measurement.2012.09.022
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3-Dimensional profile distortion measured by stylus type surface profilometer

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Cited by 24 publications
(12 citation statements)
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“…Indeed, different correction algorithms [44,45] can be used for surface reconstruction; those algorithms may be rather complex, depending the tip geometry. In the present work, an algorithm similar to that of Lee et al [46] was applied in order to reconstruct the 3D profile obtained using a spherical tip.…”
Section: Profilometry Measurement Processingmentioning
confidence: 99%
See 1 more Smart Citation
“…Indeed, different correction algorithms [44,45] can be used for surface reconstruction; those algorithms may be rather complex, depending the tip geometry. In the present work, an algorithm similar to that of Lee et al [46] was applied in order to reconstruct the 3D profile obtained using a spherical tip.…”
Section: Profilometry Measurement Processingmentioning
confidence: 99%
“…This simulation calculates the position a half-sphere of 12.5 μm radius can reach before it comes into contact with the 3D microscopy profile; afterwards, a new height which takes into account the shape of the tip is calculated. As mentioned earlier, the construction of the profile from a spherical tip is similar to the method developed by Lee et al [46]. If the surface of the sample is smooth, the contact point is located at the basis of the hemisphere (Fig.…”
Section: Comparison Of the Profilometry And The 3d Laser Scanning Micmentioning
confidence: 99%
“…For this purpose, a surface profilometer was used with a contact stylus to achieve the maximum accuracy and efficiency. Once the surface analysis was complete, other factors were also determined through the comparison of all the peaks and valleys with the mean line [15,16].…”
Section: Techniques and Proceduresmentioning
confidence: 99%
“…In the case of scattering surfaces such as we consider, the re-entrant beam problem is much less of an issue, so we can directly deploy various types of optical non-contact probes at a fixed (vertical) orientation in space [10]. In particular, we are using chromatic-aberration probes (CHRocodile chromatic optical probes, specifically the RB 200-071 with 10mm range and 300nm axial resolution.…”
Section: Instrument Structurementioning
confidence: 99%