IEEE 1987 Ultrasonics Symposium 1987
DOI: 10.1109/ultsym.1987.199008
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3 GHz Bandwidth Bragg Cells

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Cited by 4 publications
(3 citation statements)
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“…Moreover, its application for transferring single crystal Lithium Niobate thin layer into silicon proved to be effective for SAW device development [13]. As this technology requires a severe know-how and complex technological facilities and environment, an alternative fabrication technique based on metal diffusion at the interface between the materials to be bonded together [14] has been developed together with a lapping/polishing technique for HBAR manufacturing [15]. In this particular approach, contrary to the sputtering method, thermal process forbids to stack materials presenting notably differential thermal expansion coefficients.…”
Section: Hbar Micro-fabricationmentioning
confidence: 99%
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“…Moreover, its application for transferring single crystal Lithium Niobate thin layer into silicon proved to be effective for SAW device development [13]. As this technology requires a severe know-how and complex technological facilities and environment, an alternative fabrication technique based on metal diffusion at the interface between the materials to be bonded together [14] has been developed together with a lapping/polishing technique for HBAR manufacturing [15]. In this particular approach, contrary to the sputtering method, thermal process forbids to stack materials presenting notably differential thermal expansion coefficients.…”
Section: Hbar Micro-fabricationmentioning
confidence: 99%
“…Although marginal, their application has been mainly focused on filters and frequency stabilization (oscillator) purposes [7], but the demonstration of their effective implementation for sensor applications has been achieved recently [8]. These devices maximize the Q factor that can be obtained at room temperature using elastic waves, yielding quality factor times Frequency products (Q.f) close or slightly above 10 14 , i.e. effective Q factors of about 10,000 at 1GHz in theory (practically, Q factors in excess of 50,000 between 1.5 and 2GHz were experimentally achieved [9]) HBAR-based sensors exploit two principal features yielding notable differences with other sensing solutions.…”
Section: Introductionmentioning
confidence: 99%
“…IC, expj2~yi(sinp~+sine/hc.a)l2 ( 5 ) which means that the interference pattern is shifted along the p angle versus the variation of 0 by a scale factor S:…”
Section: D Acoustwntic Architecturementioning
confidence: 99%