2005
DOI: 10.1115/1.2352778
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3-Omega Measurements of Vertically Oriented Carbon Nanotubes on Silicon

Abstract: An exploratory thermal interface structure, made of vertically oriented carbon nanotubes directly grown on a silicon substrate, has been thermally characterized using a 3-omega method. The effective thermal conductivities of the carbon nanotubes (CNT) sample, including the effects of voids, are found to be 74W∕mK to 83W∕mK in the temperature range of 295K to 323K, one order higher than that of the best thermal greases or phase change materials. This result suggests that the vertically oriented CNTs potentially… Show more

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Cited by 221 publications
(174 citation statements)
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“…155 For thin-films on a substrate, 3 method usually measure thermal conductivity in the direction perpendicular to the film plane. By using heaters with width comparable to the film thickness to explore heat spreading inside the film, however, both in-plane and cross-plane thermal conductivity can be 45 determined.…”
Section: 1 3 Methodsmentioning
confidence: 99%
“…155 For thin-films on a substrate, 3 method usually measure thermal conductivity in the direction perpendicular to the film plane. By using heaters with width comparable to the film thickness to explore heat spreading inside the film, however, both in-plane and cross-plane thermal conductivity can be 45 determined.…”
Section: 1 3 Methodsmentioning
confidence: 99%
“…Another similar scenario is nanowire or nanotube arrays used as thermal interface materials. [11][12][13][14][15][16][17] Although heat spreading from an isolated nanotube to a substrate is highly ballistic, [18][19][20] it is not clear whether the same effect exists for arrays of nanowires and nanotubes as used for real thermal interface materials.…”
Section: Introductionsmentioning
confidence: 99%
“…This trend has been observed in independent thermal measurements with aligned MWCNT 14 and SWCNT films, 15,16 however there could be a wide variation in the measured conductivities depending on the presence of noncarbon content and structural order of the tubes. To interpret this difference, we performed thermal resistance measurements as a function of applied pressure on the sprayed MWCNT and SWCNT samples using the ASTM D5470 17 thermal resistance test method.…”
Section: Resultsmentioning
confidence: 69%