3D In Vivo optical coherence tomography based on a low-voltage, large-scan-range 2D MEMS mirror

Sun, Jingjing; Guo, Shan; Wu, Lei; Liu, Lin; Choe, Se-woon; Sorg, Brian S.; Xie, Huikai

doi:10.1364/oe.18.012065

Cited by 141 publications

(124 citation statements)

References 34 publications

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“…First, the scanning MEMS mirrors are operated by using electrostatic [25][26][27][28][29][30][31], electromagnetic [22,32], or electrothermal [33][34][35][36][37][38][39] actuation. An electrostatic force between suspending and fixed electrodes induces the electrostatic actuation, which allows a high scanning resonant frequency but it often requires high operational voltages.…”

Section: Actuation Mechanism Of Microscannersmentioning

confidence: 99%

“…The resonant frequencies of the mirror and frame actuator structures are 445 and 259 Hz, respectively. Sun et al also have reported a gimbal-less two-axis electrothermal MEMS mirror [37]. Four microactuators on each side increase a scanning area and satisfy lateral-shift-free design suspending the mirror plate (1 mm × 1 mm).…”

Section: Actuation Mechanism Of Microscannersmentioning

confidence: 99%

See 1 more Smart Citation

Microscanners for optical endomicroscopic applications

Hwang

Seo

Jeong

2017

Micro and Nano Syst Lett

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MEMS laser scanning enables the miniaturization of endoscopic catheters for advanced endomicroscopy such as confocal microscopy, multiphoton microscopy, optical coherence tomography, and many other laser scanning microscopy. These advanced biomedical imaging modalities open a great potential for in vivo optical biopsy without surgical excision. They have huge capabilities for detecting on-demand early stage cancer with non-invasiveness. In this article, the scanning arrangement, trajectory, and actuation mechanism of endoscopic microscanners and their endomicroscopic applications will be overviewed.

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Section: Actuation Mechanism Of Microscannersmentioning

confidence: 99%

Section: Actuation Mechanism Of Microscannersmentioning

confidence: 99%

Microscanners for optical endomicroscopic applications

Hwang

Seo

Jeong

2017

Micro and Nano Syst Lett

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“…Modifications to the thermoelectric-bimorph structures can overcome this limitation by anchoring at the center of the mirror edges, as shown in Figure 2 [21].…”

Section: Thermoelectric Actuationmentioning

confidence: 99%

“…Their versatility further allows operation at resonance to achieve high-speed raster scanning, which is necessary for real-time en face imaging. Various MEMS scanning mirrors have been developed for beam steering in confocal microscopy [9][10][11][12][13][14], OCT [15][16][17][18][19][20][21], and two-photon microscopy [22]. In these micromirrors, 2D scanning motions can derive from thermoelectric, electrostatic, electromagnetic, or piezoelectric actuation, and the microfabrication adaptability of MEMS devices facilitates integration of additional functionality such as adjustable-focal-length scanning micromirrors [23] or dynamic aberration correction [24].…”

Section: Introductionmentioning

confidence: 99%

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

Lin

Keeler

2015

Micromachines

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Microelectromechanical systems (MEMS) have an unmatched ability to incorporate numerous functionalities into ultra-compact devices, and due to their versatility and miniaturization, MEMS have become an important cornerstone in biomedical and endoscopic imaging research. To incorporate MEMS into such applications, it is critical to understand underlying architectures involving choices in actuation mechanism, including the more common electrothermal, electrostatic, electromagnetic, and piezoelectric approaches, reviewed in this paper. Each has benefits and tradeoffs and is better suited for particular applications or imaging schemes due to achievable scan ranges, power requirements, speed, and size. Many of these characteristics are fabrication-process dependent, and this paper discusses various fabrication flows developed to integrate additional optical functionality beyond simple lateral scanning, enabling dynamic control of the focus or mirror surface. Out of this provided MEMS flexibility arises some challenges when obtaining high resolution images: due to scanning non-linearities, calibration of MEMS scanners may become critical, and inherent image artifacts or distortions during scanning can degrade image quality. Several reviewed methods and algorithms have been proposed to address these complications from MEMS scanning. Given their impact and promise, great effort and progress have been made toward integrating MEMS and biomedical imaging.

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“…Microelectromechanical systems (MEMS) scanning mirrors are widely used in a variety of applications such as Fourier transform (FT) spectroscopy [1,2], confocal microscopy [3], optical coherence tomography [4,5], optical switches [6], and projection displays [7]. Scan range, speed, driving voltage, power consumption and footprint are among the key parameters for MEMS scanning mirrors.…”

Section: Introductionmentioning

confidence: 99%

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

2015

Self Cite

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This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 µm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is˘18˝at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.

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3D In Vivo optical coherence tomography based on a low-voltage, large-scan-range 2D MEMS mirror

Cited by 141 publications

References 34 publications

Microscanners for optical endomicroscopic applications

Microscanners for optical endomicroscopic applications

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

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